IONTOF M6 TOF-SIMS

HIGHLIGHTS
IONTOF M6 TOF-SIMS

Surface imaging: high lateral resolution ( < 50nm )
Surface spectroscopy: new level of mass resolution ( > 30,000 ) and sensitivity
Unique delayed extraction mode for high transmission with high lateral and high mass resolution simultaneously
Depth profiling: unmatched dynamic range and detection limits from nm to µm
Gas cluster ion source for best resolution in organic depth profiling
3D analysis: Don’t miss anything – Retrospective Analysis
FIB / SIMS hybrid automated 3D Tomography
Hybrid SIMS: TOF MS/MS with the highest mass resolution ( > 240,000 ) and highest mass accuracy ( < 1ppm ) for molecular structure elucidation
SIMS / SFM hybrid: true 3D chemical analysis