Surface Sciences
Contact & Support
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Time of Flight SIMS
The flexible, high precision sample manipulators as
well as the perfect charge compensation allow the analysis of
virtually all kinds of samples
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Sector SIMS
IMS 7F / 7f-GEO, IMS WF, SC
Ultra, IMS 1280 and Shielded IMS 7FR
read more...
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Quadrupole SIMS
UNIVERSAL QUADRUPOLE SIMS 4550
and FULL-WAFER METROLOGY TOOL for ULE SIMS 4600
read more...
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LEIS
The Qtac is a high sensitivity low energy ion
scattering (LEIS) instrument. It is extremely surface
sensitive, providing elemental and structural
characterisation of the top atomic layer
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LEXES
Used in the semiconductor industry for yield
enhancement during R&D, Technology Ramping and Mass Production
phases. Provides non-destructive ……

Tomographic Atom Probe
Used for precise and quantitative
3-dimensional elemental mapping of chemical heterogeneities
in materials at the atomic scale.Its lateral and depth
resolution are the highest of any elemental analysis
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