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Surface Metrology
Non-contact optical Profiler
Contact & Support
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The Xi-100 is designed for the researcher who
is interested in getting fast, repeatable data from an
instrument that is unencumbered by unnecessary levels of
complication. The Xi-100 uses phase-shifting interferometric
technology combined with an optical microscope to provide a
non-contact 3D method of measuring the roughness of
surfaces.
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Xi-100 Features Include:
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Precise, high-resolution, non-contact 3D
profiler
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'Point and shoot' operation. The only
instrument adjustments for capturing measurements are sample
position and focus, allowing for rapid and easy imaging.
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Accurate and repeatable data on smooth or
rough surfaces
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Measure smooth surfaces at the nanometer
level - 0.2 nm (smooth mode) Vertical Resolution
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Full featured 3D analysis software comes
standard with the Xi-100 and operates with Windows®, Intel
Processor and TFT Flat Panel Monitor. Analysis package
provides surface roughness, waviness, step height,
algorithms, and calculation tools
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Xi-100 can quickly and accurately measure
smooth surfaces at the nanometer level. Its design makes it
easy to measure a variety of sample types: opaque,
transparent, smooth or rough with a non-contact
interferometric method (requires minimum sample reflectivity
of 2% @ 550 nm).
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XY Stage Movement of 100 x 100 nm
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