3D True Colour Optical Profiler
InfiniteFocus is an optical 3D measurement device
for quality assurance in the micro- and nano range. It provides
all functionalities for dimensional measurements, surface
analysis and characterization. Geometries with steep flanks,
highly reflective properties and strong roughness are measured
with a vertical resolution up to 10nm, making the instrument
ideal for surface study of both homogeneous and compound
materials. 3D Measurements are performed directly in the optical
image.
Its operating principle combines the small depth
of focus of an optical system with vertical scanning to provide
topographical and colour information from the variation of
focus.
Novel and unique algorithms reconstruct this into
a single 3D data set with accurate topographical information.
Traceable calibration standards allow the verification of
measurement results. The instrument can be used in both the
laboratory and during production, it can also be operated by
semi skilled technicians where required. Automation of functions
and analysis can also be added to make the instrument useable
for the majority of surface metrology and inspection
requirements.
