The new Vistec INS3000 DUV is
Vistec's latest development in the area of
optical defect inspection and review station for
up to 200mm wafer size. The all stainless-steel
system features a fully automatic integrated
microscope, including visible-, UV- and DUV-imaging.
The design
priorities of the INS3000 DUV are of ergonomy,
cleanliness, automation and user-friendliness.
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key Features
User-friendly defect review and inspection station
1 or 2 cassette front loading, including SMIF
Ultimate optical performance with the new HCS/UV/DUV
optical system
User friendly operation through optimum ergonomic
design
Newly developed Windows™ NT-based user interface
Review interfaces for all major inspection systems
Incorporating the advantages and
ease-of-use of a conventional optical inspection
system, the Vistec INS3000 DUV is another consistent step to achieving the
highest possible resolution to the known
outstanding quality level. With full automation
of all Visual-Light,
UV
(365nm) and DUV (248nm) imaging modes, this
multi-wavelength microscope enables you to
resolve feature sizes as small as 80nm. This high resolving power
makes it ideally suitable to fulfill the demands
of the newdesign rules featuring 0.18µm or even
0.13µm. The
new DUV technology takes you beyond the
boundaries of visible light microscopy into a
new generation of imaging and analysis
