Semiconductor Metrology
Defect Inspection, Review and ADC
Contact & Support
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Vistec ADC HP
The Fast & Easy Way of
High Performance Automatic Defect
Classification
To be successful in today's
advanced semiconductor manufacturing world,
you need Automatic Defect Classification (ADC).ADC
is a fully automated defect review system.
It has the ability to completely replace
cost- and time-consuming manual operator
defect classification, saving money and
manpower. It provides fast, consistent
results and is highly accurate.
Vistec ADC HP is a user
friendly knowledge-based system that
acquires characterization information
directly from the defect image and
classifies the defect using stored
knowledge.
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key Features
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Easy: Effortless system training via an
intuitive eight step recipe setup; Simple, fast and
efficient operation based upon automated parameter setup; No
previous 'expert' classification necessary; No ADC specific
knowledge necessary; Powerful autogroup feature
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Accurate: Operator independent results for
reliable data input; High accuracy on all process layers and
products; Superior image quality due to extraordinary
optics; Impressive <100nm optical resolution with Vistec's
outstanding DUV technology; Powerful Laser Autofocus, Video
Focus and Multifocus
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Fast: Increased throughput through parallel
processing; Fully automatic classification with high
throughput; Lower cycle time of defect detection process
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Reduced time-to-detect and time-to-correct of
excursions; 50% less time-to-result in comparison with
former ADC systems
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Low cost: Fully compatible and retrofittable
to Vistec's Optical Inspection & Review Systems; Full
integration requires no extra footprint; ADC performed on
optical review station (low Cost of Ownership of defect
management process); Knowledge base can be built off-line
with captured images; Low Cost of Ownership
