*** Microanalysis ***

Advanced Microscopy
- 3D True Color Optical Imaging
- Acoustic Microscopy
- Confocal Laser Scanning Microscopy
- Electron Microscopy
- Infrared Microscopy
- Live Cell Imaging
- Industrial Optical Microscopy
- Scanning Probe Microscopy
Focused Ion Beam (FIB)
- Single Beam System
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- Double Beam System
- Triple Beam System
- Cross Beam System
- Neon
Microanalysis
- Electron Probe Micro-Analyzer (EPMA)
- Energy Dispersive Microanalysis System (EDS)
- Wavelength Dispersive Microanalysis System (WDS)
- Electron Backscattered Diffraction (EBSD)
Surface Metrology
- 3D True Colour Optical Profiler
- Stylus Profiler
- Non-contact optical Profiler
Semiconductor Metrology
- Industrial Optical Microscopy
- Infared Microscopy
- Defect Inspection, Review and ADC
- Macro and Micro Defect Review Tool
Surface Sciences
- Sector SIMS
- Time OF Flight SIMS
- Quadrapole SIMS
- LEIS
- LEXES
- Tomographic Atom Probe
UHV Thin Film Deposition
- Physical Vapor Deposition (PVD)
- Molecular Beam Epitaxy System (MBE)
Vacuum Solution
Workstations
- Imaging Workstation
- Fluorescence Workstation
- Live Cell Imaging Workstation
- Material Workstation
Sample Preparations
- Drying
- Coating
- Cryo transfer
- Cryo-fixation
- Freeze-etch & -fracture System
- Freeze Substitution System
- Glass Knife Maker & Diamond Knives
- Ultramicrotome
- Ultramicrotome With Cryo
- Microtome
- Automatic Tissue Processor
- Argon Ion Milling System

Microanalysis
Energy Dispersive Microanalysis System (EDS)

Contact & Support
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EDS

The SUPRA� series of field emission SEMs all combine ultra high resolution imaging with full analytical capabilities. The compact GEMINI� objective lens enables an analytical working distance of only 8.5 mm with a take-off angle of 35�. The short working distance together with the high take-off angle are ideal to combine high resolution imaging with full quantitative EDS analysis.

SUPRA� plus EDS offers:

EDS analysis fully compatible with other imaging detectors
Simultaneous EDS/WDS, either fully focussing or compact X-ray optics type
Fully quantitative EDS analysis
Fully automatic inclusion 8 particle analysis with elemental mapping
EDS analysis on non-conducting specimens in VP mode

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