Advanced Microscopy
Acoustic Microscopy
Contact & Support
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EVOLUTION III
The
EVOLUTION
III is a
high-performance
tool
enabling
non
destructive
acoustic
investigations
for
dedicated
high
throughput
analysis,
quality
control
and
research
applications.
It
features
a new
high
speed
maintenance
free
stage
and new
rf and
transducer
technologies
of up to
400 MHz,
controlled
through
a user
friendly
graphical
interface.
Built to
semiconductor
industry
standards
around a
core
platform
that
utilises
the
latest
production
and
research
technology,
the
EVOLUTION
III can
accurately
handle
wafers
up to
300 mm
and
samples
up to
320 mm x
200 mm x
45 mm
(w/l/h).
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- EVOLUTION I
- EVOLUTION II
- EVOLUTION PI
- EVOLUTION PII
- Acoustic Tomograph SAT I
- EVOLUTION II Wafer Automation
- EVOLUTION Twin Scan
