*** Acoustic Microscopy ***

Advanced Microscopy
- 3D True Color Optical Imaging
- Acoustic Microscopy
- Confocal Laser Scanning Microscopy
- Electron Microscopy
- Infrared Microscopy
- Live Cell Imaging
- Industrial Optical Microscopy
- Scanning Probe Microscopy
Focused Ion Beam (FIB)
- Single Beam System
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- Double Beam System
- Triple Beam System
- Cross Beam System
- Neon
Microanalysis
- Electron Probe Micro-Analyzer (EPMA)
- Energy Dispersive Microanalysis System (EDS)
- Wavelength Dispersive Microanalysis System (WDS)
- Electron Backscattered Diffraction (EBSD)
Surface Metrology
- 3D True Colour Optical Profiler
- Stylus Profiler
- Non-contact optical Profiler
Semiconductor Metrology
- Industrial Optical Microscopy
- Infared Microscopy
- Defect Inspection, Review and ADC
- Macro and Micro Defect Review Tool
Surface Sciences
- Sector SIMS
- Time OF Flight SIMS
- Quadrapole SIMS
- LEIS
- LEXES
- Tomographic Atom Probe
UHV Thin Film Deposition
- Physical Vapor Deposition (PVD)
- Molecular Beam Epitaxy System (MBE)
Vacuum Solution
Workstations
- Imaging Workstation
- Fluorescence Workstation
- Live Cell Imaging Workstation
- Material Workstation
Sample Preparations
- Drying
- Coating
- Cryo transfer
- Cryo-fixation
- Freeze-etch & -fracture System
- Freeze Substitution System
- Glass Knife Maker & Diamond Knives
- Ultramicrotome
- Ultramicrotome With Cryo
- Microtome
- Automatic Tissue Processor
- Argon Ion Milling System

Advanced Microscopy
Acoustic Microscopy

Contact & Support
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EVOLUTION II Wafer Automation

EVOLUTION II Wafer Automation is especially developed for the use of �inline� production control. It is corresponding to the clean room step 10.

Key Features:

Fully automated, integrated image analysis software for defect recognition and mapping.
High performance acoustic scanning system with linear motion scanner, motorized z and acoustic auto focus.
20 mm high speed robot for wafer handling up to 200 mm.
Fully automated wafer chuck for wafer handling in water.
Up to 3 cassette load stations, drying unit.
bar code reader and pre-aligner.
SECS interface for wafer fab communication.

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- EVOLUTION I

- EVOLUTION II

- EVOLUTION III

- EVOLUTION PI

- Acoustic Tomograph SAT I

- EVOLUTION II Wafer Automation

- EVOLUTION Twin Scan

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