Surface Sciences

Low Energy Ion Scattering (LEIS)

3000 times higher sensitivity than conventional LEIS

The Qtac is a high sensitivity low energy ion scattering (LEIS) instrument. It is extremely surface sensitive, providing elemental and structural characterisation of the top atomic layer. This new generation instrument has been developed to include small spot analysis, surface imaging, and both static and dynamic depth profiling. Its unique surface sensitivity makes the Qtac the perfect tool to study surface processes. The Qtac provides valuable information in many production and research areas on materials such as catalysts, semiconductors, metals, polymers, fuel cells, and biomaterials.

Key features of LEIS

• 3000 times higher sensitivity than conventional LEIS instruments

• Quantitative, elemental characterisation of the top atomic layer

• Spectroscopy, imaging and depth profiling capabilities

• Time-of-flight mass filtering for improved sensitivity

• Analysis of rough and non-conductive materials

The tool of choice for front-end process issues at 32nm node and beyond

Qtac100

The stand-alone version of the Qtac is based on a field-proven instrument platform. The modular design is ideal for customisation and the integration of a large variety of UHV preparation techniques. It is also possible to couple the Qtac100 to other floor standing instruments.

Customised Solutions

TOF.SIMS 5 with Qtac Extension

For many samples, including those with sensitive surfaces, the in-situ transfer between analytical techniques is very useful, avoiding contamination between analyses, and permitting direct comparison of results. The combination of the Qtac with the time-of-flight secondary ion mass spectrometer TOF.SIMS 5 makes a very effective tool for inorganic and organic surface analysis. The combination provides top atomic layer analysis, surface chemical mapping, static and dynamic depth profiling, 3D chemical imaging, layer thickness measurement and quantification.

Adding the Qtac to Other Instrumentation

Many manufacturing, surface treatment, and thin layer deposition techniques benefit from on-line quality control. For coverage and layer thickness measurements, the Qtac makes an ideal addition. The Qtac is available as a bolt-on system, tailored to individual requirements, for laboratory instruments or industrial tools. ALD and MBE instrumentation are typical examples.