logo

 
  • Home
  • Laboratory
  • Products ▼
    • Advanced Microscopy
      • Electron Microscopy
        • TableTop Microscope
          • Tabletop Microscopes TM4000II/TM4000PlusII
          • Tabletop Microscopes TM4000/TM4000Plus
          • TM Series Energy Dispersive X-ray Spectrometer: Quantax75
          • TM Series Energy Dispersive X-ray Spectrometer: Element Series
          • TM Series Energy Dispersive X-Ray Spectrometers: AZtec Series
          • The TM Series 3D visualization software Hitachi map 3D
        • Variable Pressure Scanning Electron Microscope (VP-SEM)
          • Scanning Electron Microscopes SU3800/SU3900
          • Scanning Electron Microscope SU3500
          • Scanning Electron Microscope S-3700N
          • Scanning Electron Microscope FlexSEM 1000 / FlexSEM 1000 II
        • Field Emission Scanning Electron Microscope (FESEM)
          • Ultra-high Resolution Field Emission Scanning Electron Microscope SU9000
          • Ultra-high Resolution Field Emission Scanning Electron Microscope Rugulus Series
          • Ultra-High-Resolution Schottky Field Emission Scanning Electron Microscope SU7000
          • Schottky Field Emission Scanning Electron Microscope SU5000
        • Transmission Electron Microscope (TEM)
          • Field Emission Transmission Electron Microscope HF5000
          • Field Emission Transmission Electron Microscope HF-3300
          • Transmission Electron Microscope H-9500
          • Transmission Electron Microscope HT7800 Series
        • Transmission Electron Microscope (STEM)
          • Field Emission Scanning Transmission Electron Microscope HD-2700 with and without spherical aberration corrector
      • MicroCT
        • Specimen Systems
          • µCT 35
          • µCT 40
          • µCT 45
          • µCT 50 (nano CT)
          • µCT 90
          • µCT 100
          • µCT 100 HE
        • Preclinical Systems
          • vivaCT 40 - In vivo MicroCT
          • vivaCT 75 - In vivo MicroCT
          • vivaCT 80 - In vivo MicroCT
          • XtremeCT II
          • XtremeCT
        • Clinical microCT
          • XtremeCT II
      • Scanning Acoustic Microscopy
        • KSI v-Series
          • KSI v 300
          • KSI v8
          • KSI v8 Advanced
          • KSI v8 Duo
          • KSI v8 Multihead
    • Focused Ion Beam
      • Focused Ion and Electron Beam System Ethos NX5000
      • Real-time 3D analytical FIB-SEM NX9000
      • Focused Ion and Electron Beam System & Triple Beam System NX2000
      • Focused Ion Beam System MI4050
      • Mirco-sampling system
      • CAD Navigation System
        NASFA (Navigation
        system for Failure
        Analysis)
    • Atomic Force Microscopy
      • Probe Station AFM5000II / Real TuneII
      • General-purpose Small Unit AFM5100N
      • Environment Control Unit AFM5300E
      • Atomic Force Microscope AFM5500M
    • Microanalysis
      • Energy Dispersive Microanalysis System (EDS)
        • TEAM™ EDS System for SEM
        • TEAM™ EDS System for TEM
        • Genesis System
        • EDS Detectors
          • Silicon Drift Detector (SDD) for the Transmission Electron Microscope (TEM)
          • Silicon Drift Detector (SDD) for the Scanning Electron Microscope (SEM)
          • Si(Li) Detector
      • Wavelength Dispersive Microanalysis System (WDS)
        • LEXS
        • TEXS
      • Electron Backscattered Diffraction (EBSD)
        • TEAM™ EBSD Analysis System
        • OIM™ Data Analysis
        • EBSD Cameras
          • Hikari XP EBSD Camera
          • DigiView IV EBSD Camera
          • Forward Scatter Detector (FSD)
    • nano-IR Spectroscopy
      • mIRage IR microscope
      • O-PTIR
    • Surface Metrology
      • Measuring Microscopes
        • Portable Measuring Microscopes
        • Video Measuring Microscopes
        • Measuring Microscopes with eyepiece
      • Microhardness Tester VMHT
    • Surface Sciences
      • LEIS
      • VLS-80
      • SurfaceLab 7
      • SIMS
        • M6
        • M6 Plus
        • M6 Hybrid SIMS
        • TOF-SIMS 5
      • X-ray Photoelectron Spectrometer (XPS)
        • K-Alpha™+ X-ray Photoelectron Spectrometer (XPS) System
        • ESCALAB 250Xi X-ray Photoelectron Spectrometer (XPS) Microprobe
        • Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer (ARXPS) System
    • Raman Spectroscopy
      • XploRA Series
        • XploRA ONE™ - Simply better Raman
        • XploRA™ PLUS
        • XploRA INV
        • XP Examina - Forensics Package
      • LabRAM HR Evolution
      • Triple Raman spectrometers
    • Sample Preparations
      • Ultramicrotomes
        • PowerTome 3D
        • PowerTome PCZ
        • PowerTome XL
        • PowerTome FL
        • LN Ultra
        • Advanced Substrate Holder
        • Automated Tape Collecting Ultramicrotome
      • Rotary Microtomes
        • MT990: Rotary Microtome
        • MT990 with CR1000: Rotary Microtome with Cryosectioning System
        • MR3: Series 300 Motorized Rotary Microtome
        • MR2: Series 200 Manual Rotary Microtome
      • Workflow Instruments
        • Automated EM Tissue Processor
        • Anti-Vibration Table
        • FS8500: Freeze Substitution System
        • GKM2: Glass Knife Maker
      • Sputter Coaters and SEM/ TEM Carbon Coaters
        • SC7620 Mini Sputter Coater/Glow Discharge System
        • Q150V Plus for ultra-fine coatings in high vacuum applications
        • Q150R Plus - Rotary Pumped Coater
        • Q150T Plus - Turbomolecular pumped coater
        • Q150 GB Turbo-Pumped Sputter Coater / Carbon Coater for Glove Box
        • Q300T T Plus - triple target sputter coater for specimens up to 200mm diameter
        • Q300T D Plus - dual target sequential sputtering for specimens up to 150 mm diameter
      • Cryo-SEM Preparation Systems
        • PP3010T Cryo-SEM/Cryo-FIB/SEM Preparation System
        • PP3006 CoolLok Cryo Transfer for SEM and FIB/SEM
        • PP3005 SEMCool Non-Airlock Cooling System for SEM and FIB/SEM
      • Critical Point Dryers
        • E3100 Critical Point Dryer
        • K850 Critical Point Dryer
        • K850WM Large Chamber Critical Point Dryer
      • Freeze Dryers for Sample Preparation
        • K750X Peltier-Cooled EM Freeze Dryer
        • K775X Liquid Nitrogen Cooled Turbo-Pumped EM Freeze Dryer
      • Bench-Top Vacuum Evaporators
        • K975X/K975S Turbo-Pumped Thermal Evaporators
      • Recirculating Heaters and Chillers
        • E4800 Recirculating Heater/Chillers
      • Coolstage - Peltier-Cooled SEM Stage
      • K1050X RF Plasma Etcher/Asher/Cleaner
      • PP3004 QuickLok Ambient Transfer System
      • GloQube Glow Discharge System for TEM Grids and Surface Modifications
      • Sputter Targets
      • Carbon Consumables
      • IM4000Plus Series Ion-Milling Systems
      • ZONE Desktop Sample Cleaner and Desiccator for SEM/TEM
  • Activities
  • About us
  • Career
  • Contact us
Sample Preparations

Q150T Plus - Turbomolecular pumped coater

The Q150T Plus is optimised for use with a turbomolecular pump, which gives a lower vacuum down to 5 x 10-5 mbar. This enables the sputtering of oxidising metals, which have a lower grain size suitable for high-resolution imaging. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.


Key features

• New touch and swipe capacitive screen
• USB port for upgrades and download of process log files
• Multiple-user profiles can be set up on one machine
• New software sorts recipes per user according to recent use
• 16GB of memory can store more than 1000 recipes
• New multi-colour LED visual status indicator
• Capable of achieving vacuum of 5 x 10-5 mbar

Product descriptions

The Q150T Plus is available in three configurations:

• Q150R S Plus – an automatic sputter coater for non-oxidising metals.   Sputtering targets include; Cr, Ir, W, ITO, Al

other targets available

• Q150R E Plus – an automatic carbon cord coater for SEM applications   such as EDS and WDS.

Metal evaporation/aperture cleaning option available.

• Q150R ES Plus – a combined system system capable of both sputtering   and carbon coating. The deposition heads can be swapped in seconds.   Metal evaporation/aperture cleaning option available.

Recommended applications for Q150T Plus:

• High-resolution magnification SEM
• Protective platinum layers for FIB
• R&D of corrosion-, friction-, and wear protective layers
• Protective layers on medical devices
• BSE imaging
• EDX, WDS, EBSD analysis
• Carbon coating of replicas

These products are for Research Use Only.

New user interface has been thoroughly updated:

• Capacitive touch screen is more sensitive for ease of use
• User interface software has been extensively revised, using a modern   smartphone-style interface
• Comprehensive context-sensitive help screen
• USB interface allows easy software updates and backing up/copying of   recipe files to USB stick
• Process log files can be exported via USB port in .csv format for analysis   in Excel or similar. Log files include date, time and process parameters.
• 16GB of flash memory can store more than 1000 recipes
• Dual-core ARM processor for a fast, responsive display

Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.

Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.

System prompts user to confirm target material and it then automatically selects appropriate parameters for that material.

Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own.

Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.

Automatic, controlled carbon rod evaporation for TEM applications


Careful evaporation allows precise control of carbon thickness (with or without the optional film thickness monitor). The quality of the resulting carbon films is also enhanced by the eradication of “sparking” that is a common feature of less advanced coaters.

For reproducible high-quality carbon films, we would recommend the use of shaped carbon rods. Rods are higher purity, less susceptible to debris and easier to control. Pulsed and ramped carbon rod recipes are supplied as standard.

Multiple stage options

The Q150T Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage).

Some examples:
• Rotation stage (supplied as standard): 50 mm Ø can accommodate six   standard stubs. Height can be pre-set.
• Rotate-tilt stage for improved uniform coating: 50 mm Ø. Tilt and height   can be pre-set.
• Variable angle, rotary planetary stage for heavily contoured samples.
• Large flat rotation stage with offset gear box for 4”/100 mm wafers.
• Rotation stage for glass microscope slides.

Other options are available on request.

Safety

The Q150T Plus meets key industry CE standards
• All electronic components are protected by covers
• Implosion guard prevents user injury in event of chamber failure
• Vacuum interlocks remove power from deposition sources to prevent user   exposure to high voltage in event of chamber being opened
• Electrical interlocks remove power when source head cover opened
• Overheating protection shuts down power supply

 

Q150T Plus - Turbomolecular pumped coater









Sample Preparations

• SC7620 Mini Sputter   Coater/Glow Discharge   System

• Q150V Plus for ultra-fine   coatings in high vacuum   applications

• Q150R Plus - Rotary   Pumped Coater

• Q150T Plus -   Turbomolecular pumped   coater

• Q150 GB Turbo-Pumped   Sputter Coater / Carbon   Coater for Glove Box

• Q300T T Plus - triple   target sputter coater for   specimens up to 200mm   diameter

• Q300T D Plus - dual   target sequential   sputtering for specimens   up to 150 mm diameter

Copyright 2012 © All Rights Reserved By HI-TECH INSTRUMENTS.