Items
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Description
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Resolution SE | 3.0nm at 30kV (High Vacuum Mode) | |
Resolution BSE | 4.0nm at 30kV (Variable Pressure Mode) | |
Magnification | ×5 to ×300,000 | |
Accelerating Voltage | 0.3 to 30kV | |
Low vacuum Range | 6 to 270Pa through graphic menu | |
Image Shift | ±50µm (WD=15mm) | |
Maximum Specimen Size | 153mm in diameter | |
Specimen Stage | X | 0 to 80mm |
Y | 0 to 40mm | |
Z | 5 to 50mm | |
R | 360° | |
T | -20° to 90° | |
Observable area | 126mm in diameter (with rotation) | |
Maximum Height | 60mm (WD=15mm) | |
Electron Optics | Electron Gun | Precentered Cartridge Filament |
Objective Aperture | 5-position, click stop objective aperture | |
Gun Bias | Quad bias with variable bias control | |
Detectors | Secondary Electron Detector | |
High Sensitivity Semiconductor BSE Detector | ||
Analytical Position | WD = 15mm, TOA = 35° | |
Display | OS | Windows® XP (subject to change without notice) |
Controls | Mouse, Keyboard | |
Monitor | 19 type LCD (subject to change without notice) | |
Auto Alignment | Auto Beam Setting, Auto Axial Alignment | |
Auto Image Adjustment | Auto Focus, Auto Stigmator/Focus | |
Auto Brightness & Contrast | ||
Image Data Saving | 640 × 480 pixels, 1,280 × 960 pixels | |
2,560 × 1,920 pixels, 5,120 × 3,840 pixels | ||
Image Filing | Search Functions / Built-in Image Data Base with Image Processing Functions | |
Filing Format | BMP,TIFF,JPEG | |
Auto Data Display | Accelerating Voltage, Magnification, Micron Marker, Unit, Working Distance,Date/Time, Detector, Pressure | |
Image Display Mode | Full Screen Display : 1,280 × 960 pixels | |
Small Screen Display : 640 × 480 pixels | ||
Dual Image Display : 640 × 480 pixels ×2 | ||
Signal Mixing | ||
Evacuation System | Operation | Full Automatic Sequence |
Turbo molecular pump | 210L/s × 1 | |
Oil Rotary Pump | 135L/min (162L/min. with 60Hz) × 1 | |
Protection | Power Failure and Vacuum Failure | |
Auxiliary Functions | Raster Rotation | |
Dynamic Focus/Tilt Compensation | ||
Dynamic Stigma Monitor | ||
Free Layout Print Function | ||
3D Animation Maintenance Guide | ||
Operation Guide | ||
Easy Measurement | ||
Oblique image |